- etch uniformity
- рівномірність (швидкості) травлення
English-Ukrainian dictionary of microelectronics. 2013.
etch uniformity
Смотреть что такое "etch uniformity" в других словарях:
Advanced Silicon Etch — (ASE) is a deep reactive ion etching (DRIE) technique to rapidly etch deep and high aspect ratio structures in silicon.ASE was pioneered by Surface Technology Systems Plc. (STS) in 1994 in the UK. STS has continued to develop this process with… … Wikipedia
Nanoimprint lithography — is a method of fabricating nanometer scale patterns. It is a simple nanolithography process with low cost, high throughput and high resolution. It creates patterns by mechanical deformation of imprint resist and subsequent processes. The imprint… … Wikipedia
photoengraving — /foh toh en gray ving/, n. 1. a photographic process of preparing printing plates for letterpress printing. 2. a plate so produced. 3. a print made from it. [1870 75; PHOTO + ENGRAVING] * * * Any of several processes for producing printing plates … Universalium
Photolithography — For earlier uses of photolithography in printing, see Lithography. For the same process applied to metal, see Photochemical machining. Photolithography (or optical lithography ) is a process used in microfabrication to selectively remove parts of … Wikipedia
Neutron Radiography — is the process by which film is exposed by first passing neutrons through an object to produce a visible image of the materials that make up the object. Primarily used in scientific investigations. Contents 1 Brief History of Neutron Imaging 2… … Wikipedia
Neutron imaging — Manual of Style … Wikipedia
Isotropy — is uniformity in all orientations; it is derived from the Greek iso (equal) and tropos (direction). Precise definitions depend on the subject area. Exceptions, or inequalities, are frequently indicated by the prefix an, hence anisotropy.… … Wikipedia
Epitaxy — refers to the method of depositing a monocrystalline film on a monocrystalline substrate. The deposited film is denoted as epitaxial film or epitaxial layer. The term epitaxy comes from a Greek root ( epi above and taxis in ordered manner ) which … Wikipedia
Photoresist — A photoresist is a light sensitive material used in several industrial processes, such as photolithography and photoengraving to form a patterned coating on a surface. Contents 1 Photoresist categories 1.1 Tone 1.2 Developing light wavelength … Wikipedia
Ellipsometry — is a versatile and powerful optical technique for the investigation of the dielectric properties (complex refractive index or dielectric function) of thin films. It has applications in many different fields, from semiconductor physics to… … Wikipedia
Micro contact printing — Figure 1: PDMS master is created by patterning silicon, pouring and curing the PDMS, and peeling away from the substrate … Wikipedia
